Feasibility of modulated optical deflection sensing in atomic force microscopy

被引:0
|
作者
Ng, TW [1 ]
Lee, WS [1 ]
Sasaki, O [1 ]
机构
[1] Natl Univ Singapore, Fac Engn, Singapore 117576, Singapore
关键词
atomic force microscopy; optical deflection; photodiode; operational amplifiers; chaos; signals;
D O I
10.1117/12.621749
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Optical deflection sensing is perhaps the most widely used scheme in atomic force microscopy. In this technique, the sensor is a quadrant photodiode. Position detection is essentially achieved using voltage differencing between the photodiode outputs. To improve data throughput, this is often done using operational amplifiers in the differencing mode. The measurement sensitivity is affected by environmental noise. Intensity modulation is a simple method of overcoming environmental noise. When this scheme is applied to the optical deflection sensor technique, random chaotic signals were found to form. Unless expensive filtering methods are introduced, the efficacy of using intensity modulation to reduce the effects of environmental noise in the optical deflection sensing method is limited.
引用
收藏
页码:621 / 626
页数:6
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