Photonic Devices in Low-Temperature Laser-Crystallized Deposited Silicon

被引：0

作者：

Preston, Kyle ^{[1
]}

Poitras, Carl B. ^{[1
]}

Thompson, Michael O. ^{[2
]}

Lipson, Michal ^{[1
]}

机构：

[1] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA

[2] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA

来源：

2010 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (QELS) | 2010年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate integrated optical devices in deposited silicon crystallized at room temperature for 3D photonic integration. These devices can enable electro-optic switching and modulation on low-temperature substrates such as glass, plastic, and post-back-end CMOS wafers. (C)2010 Optical Society of America

引用

页数：2

共 50 条

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