A novel two-dimensional atmospheric pressure plasma jet device

被引：3
|
作者：
Zhong, Nanya [1 ]
Fu, Gang [1 ]
Li, Junjun [1 ]
Lian, Chen [1 ]
Chen, Wenqi [1 ]
Huang, Kama [1 ]
机构：
[1] Sichuan Univ, Coll Elect & Informat Engn, Chengdu 610065, Peoples R China
来源：
PLASMA PROCESSES AND POLYMERS | 2022年 / 19卷 / 04期
基金：
中国国家自然科学基金;
关键词：
atmospheric pressure; electron density; electron temperature; plasma jet; two-dimensional; MICROWAVE; TECHNOLOGY; TORCH;
D O I：
10.1002/ppap.202100159
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A novel two-dimensional atmospheric pressure plasma jet device is proposed for large-area processing. A finite element algorithm is adopted to obtain the optimized dimensions of the designed device based on microwave power reflection coefficient |S-11| and electric field intensity. The plasma parameters of electron density n e and electron temperature T e within 0.1 ms after microwave power input were analyzed. When plasma is fully excited, n e is close to 3.5 x 10(18) m(-3), and T e is calculated to be 2 eV. Besides, an experimental system is established, and microwave power of 70 W can process 30 L of argon per minute, which shows a high energy efficiency. Two plasma jets with a width of 10 mm and a length of 5 mm are successfully excited. In addition, reflected power measured by the power meter is only 9.5% of incident power, which is in good agreement with simulation results.
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页数：8
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