Photoemission extended fine structure study of the SiO2/Si(111) interface

被引:59
|
作者
Sieger, MT
Luh, DA
Miller, T
Chiang, TC
机构
[1] UNIV ILLINOIS,DEPT PHYS,URBANA,IL 61801
[2] UNIV ILLINOIS,SEITZ MAT RES LAB,URBANA,IL 61801
关键词
D O I
10.1103/PhysRevLett.77.2758
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
High-resolution Si 2p core level photoemission spectra of the SiO2/Si(111) system show chemically shifted components derived from individual oxidation states, which exhibit strong intensity modulations as a function of photon energy due to final-state diffraction. Analysis of these photoemission intensity modulations gives bond-length information specific to the individual suboxide. The results indicate that the interface is atomically abrupt.
引用
收藏
页码:2758 / 2761
页数:4
相关论文
共 50 条
  • [1] Photoemission extended fine structure study of the SiO2/Si(111) interface (vol 77, pg 2758, 1996)
    Sieger, MT
    Luh, DA
    Miller, T
    Chiang, TC
    PHYSICAL REVIEW LETTERS, 1996, 77 (26) : 5312 - 5312
  • [2] A photoemission study of the Ooct-OPV5/SiO2/Si(111) interface:: Effect of the SiO2 interlayer thickness
    Papaefthimiou, V
    Siokou, A
    Kennou, S
    SURFACE SCIENCE, 2004, 569 (1-3) : 207 - 218
  • [3] PHOTOEMISSION-STUDY OF THE SIO2/SI INTERFACE STRUCTURE OF THIN OXIDE-FILMS ON SI(100), (111), AND (110) SURFACES
    NIWANO, M
    KATAKURA, H
    TAKEDA, Y
    TAKAKUWA, Y
    MIYAMOTO, N
    HIRAIWA, A
    YAGI, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (02): : 195 - 200
  • [4] Internal photoemission at the Si/SiO2 and Si/metal interface
    Boedecker, K
    Konenkamp, R
    JOURNAL OF APPLIED PHYSICS, 1997, 81 (09) : 6482 - 6484
  • [5] Influence of SiO2/Si(111) interface structure on oxidation rate
    Takahashi, K.
    Nohira, H.
    Nakamura, I.
    Seman, M.B.
    Ohmi, T.
    Hattori, T.
    Extended Abstracts of International Workshop on Gate Insulator, IWGI 2001, 2001, : 140 - 142
  • [6] CORE-LEVEL PHOTOEMISSION AND THE STRUCTURE OF THE SI/SIO2 INTERFACE - A REAPPRAISAL
    HOLL, MMB
    LEE, SH
    MCFEELY, FR
    APPLIED PHYSICS LETTERS, 1994, 65 (09) : 1097 - 1099
  • [7] Cathodoluminescence study of Si/SiO2 interface structure
    Zamoryarskaya, MV
    Sokolov, VI
    Plotnikov, V
    APPLIED SURFACE SCIENCE, 2004, 234 (1-4) : 214 - 217
  • [8] SiO2 valence band near the SiO2/Si(111) interface
    Musashi Inst of Technology, Tokyo, Japan
    Appl Surf Sci, (119-122):
  • [9] SiO2 valence band near the SiO2/Si(111) interface
    Nohira, H
    Hattori, T
    APPLIED SURFACE SCIENCE, 1997, 117 : 119 - 122
  • [10] PASSIVATION OF (111) SI/SIO2 INTERFACE BY FLUORINE
    WANG, XW
    MA, TP
    APPLIED PHYSICS LETTERS, 1992, 60 (21) : 2634 - 2636