Minimization of conical particles in carbon coatings of optical fibers prepared by thermal chemical vapor deposition

被引:10
|
作者
Chen, Shin-Shueh [1 ]
Shiue, Sham-Tsong [1 ]
Cheng, Kai-Jen [1 ]
Chen, Po-Yu [1 ]
Lin, Hsun-Yu [1 ]
机构
[1] Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 402, Taiwan
关键词
reliability; growth; carbon films; optical fiber; chemical vapor deposition; thin film;
D O I
10.1117/1.2903094
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Growth of conical particles in carbon films deposited on silica glass fibers prepared by thermal chemical vapor deposition is investigated. The results show that the size and number of conical particles on the silica glass fiber increase with the film thickness and deposition temperature, but this effect is reduced when the carbon films are deposited on silica glass plates. The growth of conical particles on the silica glass fiber is mainly due to the small cross-sectional area of the fibers. These conical particles are against the hermetic property of carbon-coated optical fibers. We propose a method to minimize conical particles in carbon films on silica glass fibers. (C) 2008 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页数:5
相关论文
共 50 条
  • [1] Effects of deposition parameters on characteristics of carbon coatings on optical fibers prepared by thermal chemical vapor deposition
    Shiue, Sham-Tsong
    Chen, Po-Yu
    Lee, Ren-Hung
    Chen, Tsuen-Sung
    Lin, Hung-Yi
    SURFACE & COATINGS TECHNOLOGY, 2010, 205 (03): : 780 - 786
  • [2] Effects of different acetylene/nitrogen ratios on characteristics of carbon coatings on optical fibers prepared by thermal chemical vapor deposition
    Lee, Ren-Hung
    Lai, Liang-Hsun
    Shiue, Sham-Tsong
    THIN SOLID FILMS, 2010, 518 (24) : 7267 - 7270
  • [3] Effects of deposition temperature on the properties of hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition
    Chen, Shin-Shueh
    Shiue, Sham-Tsong
    Wu, Yu-Hua
    Cheng, Kai-Jen
    SURFACE & COATINGS TECHNOLOGY, 2007, 202 (4-7): : 798 - 803
  • [4] Effects of radio-frequency powers on the properties of carbon coatings on optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma
    Lai, Liang-Hsun
    Shiue, Sham-Tsong
    Lin, Hung-Yi
    VACUUM, 2013, 87 : 141 - 144
  • [5] Effects of radio-frequency powers on the properties of carbon coatings on optical fibers prepared by plasma enhanced chemical vapor deposition
    Lin, Hung-Chien
    Shiue, Sham-Tsong
    Chou, Yi-Ming
    SURFACE & COATINGS TECHNOLOGY, 2008, 202 (22-23): : 5360 - 5363
  • [6] Coatings Prepared by Chemical Vapor Deposition
    Zhao, Fenglin
    Hu, Changyi
    Zheng, Xu
    Qi, Xiaohong
    Cai, Hongzhong
    Wei, Yan
    Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2017, 46 (05): : 1399 - 1403
  • [7] Characteristics of carbon coatings on optical fibers prepared by plasma enhanced chemical vapor deposition using different argon/methane ratios
    Lin, Hung-Chien
    Shiue, Sham-Tsong
    Cheng, Yu-Hang
    Yang, Tsong-Jen
    Wu, Tung-Chuan
    Lin, Hung-Yi
    CARBON, 2007, 45 (10) : 2004 - 2010
  • [9] OPTICAL FIBERS PREPARED BY THE PLASMA ACTIVATED CHEMICAL VAPOR-DEPOSITION METHOD
    GEITTNER, P
    KUPPERS, D
    LYDTIN, H
    UNGELENK, J
    ACTA ELECTRONICA, 1979, 22 (03): : 237 - 244
  • [10] REPRODUCIBILITY OF OPTICAL FIBERS PREPARED BY A MODIFIED CHEMICAL VAPOR-DEPOSITION PROCESS
    DIMARCELLO, FV
    WILLIAMS, JC
    BELL SYSTEM TECHNICAL JOURNAL, 1978, 57 (06): : 1723 - 1734