A low-power multi-gate FET CMOS technology with 13.9ps inverter delay, large-scale integrated high performance digital circuits and SRAM

被引:47
|
作者
von Arnim, K. [1 ]
Augendre, E. [3 ]
Pacha, C. [2 ]
Schulz, T. [1 ]
San, K. T. [3 ,4 ]
Bauer, F. [2 ]
Nackaerts, A. [3 ]
Rooyackers, R. [3 ]
Vandeweyer, T. [3 ]
Degroote, B. [3 ]
Collaert, N. [3 ]
Dixit, A. [3 ]
Singanamalla, R. [3 ]
Xiong, W. [4 ]
Marshall, A. [4 ]
Cleavelin, C. R. [4 ]
Schruefer, K. [2 ]
Jurczak, M. [3 ]
机构
[1] Infineon Technol Leuven, Kapeldreef 75, B-3001 Leuven, Belgium
[2] Infineon Technol, Munich, Germany
[3] IMEC, Leuven, Belgium
[4] Texas Instruments Inc, Dallas, TX USA
关键词
D O I
10.1109/VLSIT.2007.4339745
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents an in-depth analysis of digital performance of a Multi-Gate FET technology. Ring oscillators with metal gates and undoped fins show an inverter delay of 13.9ps at 1 v the highest performance of a Multi-Gate FET technology reported at 1.9nA off-current/stage. NAND and NOR show significant improvement in delay vs. stack height compared to balk CMOS. SRAM cells and product-typical critical paths with more than 10k transistors demonstrate the capability,for large-scale integration.
引用
收藏
页码:106 / +
页数:2
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