Structured Light in Applications Related to the Reconstruction of Three-Dimensional Landscape of Nanorough Surfaces

In this paper a new approach to analyze a structure and to reconstruct of a rough surface with inhomogeneities from the trough to the upper point of about 20 nm is suggested. For such a diagnostic, carbon nanoparticles with both a luminescence in the yellow-green region of the spectrum and a dipole moment, for controlling the distribution of nanoparticles over the surface in the external electric field, are used. As a probe for nanoparticle diagnostics, it is suggested to apply structured light with a significant longitudinal field component, which largely withdraws the limitations imposed by the lateral resolution of the optical system. The recorded luminescence of carbon nanoparticles, that oriented parallel to the longitudinal field component, enabled not only to reproduce the location of maxima and minima of the surface with an accuracy of 6.9%, but also to reconstruct the landscape of the studied surface itself at an error of 7.7%.