Creation of convex microlenses in PDMS with focused MeV ion beam

被引：11

作者：

Szilasi, S. Z. ^{[1
]}

Hegman, N. ^{[2
]}

Csik, A. ^{[1
]}

Rajta, I. ^{[1
]}

机构：

[1] Hungarian Acad Sci, Inst Nucl Res, H-4001 Debrecen, Hungary

[2] Bay Zoltan Fdn Appl Res, Inst Nanotechnol, H-3515 Miskolc, Hungary

来源：

MICROELECTRONIC ENGINEERING | 2011年 / 88卷 / 09期

关键词：

PDMS; Proton beam writing (PBW); Irradiation; Compaction; Shrinkage; Optics; Microlens; POLYDIMETHYLSILOXANE PDMS; MICROFLUIDIC CHIP; WAVE-GUIDES; ELASTOMER; FABRICATION; RADIATION; SURFACE;

D O I：

10.1016/j.mee.2011.03.007

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work the creation of convex microlenses is presented in polydimethylsiloxane using shrinkage of the polymer due to energetic ions. The creation process is based on the observation that the PDMS shrinks due to irradiation and the surface of the unirradiated areas will have a regular curvature between the irradiated places. The created microlenses were arranged in arrays, the diameters were varied between 15 and 200 mu m. The properties of the lenses were investigated using an AFM and a profilometer. The profile of the lenses turned out to be parabolic, the focal lengths were found to be between 18 and 180 mu m, that can be adjusted with the delivered ion fluence and the lens diameter. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：2885 / 2888

页数：4

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