RF MEMS switch for wireless LAN applications

被引：4
|
作者：
Lee, KK [1 ]
Kim, BC [1 ]
机构：
[1] Arizona State Univ, Ctr Solid State Elect Res, Dept Elect Engn, Tempe, AZ 85287 USA
来源：
INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS | 2003年
关键词：
D O I：
10.1109/ICMENS.2003.1221973
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
Double cantilever beam MEMS switch was developed for wireless LAN applications. The two beams are controlled by a single actuation electrode. The dimension of the fabricated cantilever beam is 150mum x 60mum x 0.6mum. The spacing between the top beam and the bottom ground electrode was approximately 1mum. This switch has low pull-in voltage of 15V and fast switching speed of 60mus. An RF performance with >-50dB isolation below 5GHz and < -0.18dB up to 30GHz was observed.
引用
收藏
页码：100 / 102
页数：3
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