Textures of thin films

被引:8
|
作者
Oettel, H [1 ]
Klimanek, P [1 ]
机构
[1] Freiberg Univ Min & Technol, Dept Met Phys, D-09596 Freiberg, Germany
来源
关键词
ECD; PVD; thin films; fiber texture; oriented nucleation; grain growth;
D O I
10.4028/www.scientific.net/MSF.273-275.55
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:55 / 65
页数:11
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