Reconstruction of optical wavefronts with parallel registration algorithms

被引:0
|
作者
Berlakovich, Nikolaus [1 ]
Fuerst, Martin [1 ]
Csencsics, Ernst [1 ]
Schitter, Georg [1 ]
机构
[1] TU Wien, Automat & Control Inst ACIN, Christian Doppler Lab Precis Engn Automate InLin, A-1040 Vienna, Austria
来源
关键词
Algorithms; Optical Metrology; Wavefronts; Testing; SENSOR; SHAPE;
D O I
10.1117/12.2632961
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper presents an evaluation of three developed parallel registration algorithms for the reconstruction of optical wavefronts. Two practical use cases are considered including high-quality optics generating (i) a plane and (ii) a divergent wavefront. The wavefronts are measured segment-by-segment with a scanning Shack-Hartmann sensor measurement system and are reconstructed by the algorithms. As a benchmark for the comparison of the registration performance, the well-established iterative closest point (ICP) algorithm is used. Results show that the developed registration algorithms attain a registration precision up to a factor of 10 better than the registration precision of the ICP algorithm.
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页数:7
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