Micromachined tunable vertical-cavity surface-emitting lasers

被引：3
|
作者：
Larson, MC [1 ]
Sugihwo, F [1 ]
Massengale, AR [1 ]
Harris, JS [1 ]
机构：
[1] STANFORD UNIV,SOLID STATE ELECT LAB,STANFORD,CA 94305
来源：
IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996 | 1996年
关键词：
D O I：
10.1109/IEDM.1996.553613
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report a record continuous wavelength tuning range without mode hopping of up to 2.0 % in a vertical-cavity surface-emitting laser (VCSEL) utilizing at monolithically-fabricated electrostatically-movable micromirror. A device with a 30 mu m square top minor and 4 mu m diameter active region exhibits a continuous wavelength range of 19.1 nm near 960 nm for 0-18V tuning bias, a threshold current less than 0.4 mA, and a quantum efficiency of 6.5%. Microsecond wavelength switching is also observed.
引用
收藏
页码：405 / 408
页数：4
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