Chemical and structural characterization of barium hexaferrite films deposited on 6H-SiC with and without MgO/BaM interwoven layers

被引:14
|
作者
Cai, Zhuhua
Chen, Zhaohui
Goodrich, Trevor L.
Harris, V. G.
Ziemer, Katherine S. [1 ]
机构
[1] Northeastern Univ, Dept Chem Engn, Boston, MA 02115 USA
[2] Northeastern Univ, Dept Elect & Comp Engn, Boston, MA 02115 USA
关键词
Si diffusion; XPS depth profile; PLD; barium ferrite; magnesium oxide; silicon carbide;
D O I
10.1016/j.jcrysgro.2007.06.031
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
High quality epitaxial barium hexaferrite (BaM) films with saturation magnetization of 4.3kG, coercivity of 389Oe, and FMR linewidth of 500 Oe, have been deposited by pulsed laser deposition on 6H-silicon carbide (SiC) single crystal substrates using an interwoven layer of magnesium oxide (MgO) and BaM of approximately 16nm thick. This paper presents a chemical and structural study of the intermediate stages of BaM film growth on the interwoven layers compared to intermediate stages of BaM film growth directly on a SiC substrate. The purpose of these experiments is to understand the role of the interwoven layers and thus further improve the magnetic properties of BaM integrated with SiC substrates. X-ray photoelectron spectroscopy surface analysis and depth profiling shows that the interwoven layers effectively eliminate silicon diffusion into the bulk BaM film, and prevent the Fe diffusion which reduces Fe/Ba ratios in films deposited without the interwoven layers. By comparing the initial stages of film growth on the MgO/BaM interwoven layers with film deposited with the same number of BaM shots on a bare SiC substrate, scanning electron microscopy and atomic force microscopy results suggest that the MgO/BaM interwoven layers promote two-dimensional growth and improve the crystallographic texture of the BaM films, likely through relief of the lattice mismatch. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:321 / 327
页数:7
相关论文
共 50 条
  • [1] Structure characterization and magnetic properties of barium hexaferrite films deposited on 6H-SiC with random in-plane orientation
    Zhang, Xiaozhi
    Yue, Zhenxing
    Zhang, Yao
    CERAMICS INTERNATIONAL, 2017, 43 (12) : 8611 - 8615
  • [2] XPS study of Ni layers deposited on 6H-SiC
    Marinova, T
    Krastev, V
    Hallin, C
    Yakimova, R
    Janzen, E
    INTERGRANULAR AND INTERPHASE BOUNDARIES IN MATERIALS, PT 1, 1996, 207- : 293 - 296
  • [3] XPS study of Ni layers deposited on 6H-SiC
    Marinova, Ts.
    Krastev, V.
    Hallin, C.
    Yakimova, R.
    Janzen, E.
    Materials Science Forum, 1996, 207-209 (pt 1): : 293 - 296
  • [4] Strain effects in ZnO layers deposited on 6H-SiC
    Ashrafi, A. B. M. A.
    Segawa, Y.
    Shin, K.
    Yao, T.
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (06)
  • [5] CHEMICAL VAPOR-DEPOSITION AND CHARACTERIZATION OF 6H-SIC THIN-FILMS ON OFF-AXIS 6H-SIC SUBSTRATES
    KONG, HS
    GLASS, JT
    DAVIS, RF
    JOURNAL OF APPLIED PHYSICS, 1988, 64 (05) : 2672 - 2679
  • [6] Chemical and structural characterization of the Ni-Ti alloy/6H-SiC contacts
    Levit, M
    Grimberg, I
    Weiss, BZ
    Eizenberg, M
    III-NITRIDE, SIC AND DIAMOND MATERIALS FOR ELECTRONIC DEVICES, 1996, 423 : 125 - 130
  • [7] Properties of Thin MgO Films on 6H-SiC and GaN: Photoelectron Studies
    Lewandkow, R.
    Grodzicki, M.
    Mazur, P.
    Ciszewski, A.
    ACTA PHYSICA POLONICA A, 2022, 141 (02) : 116 - 122
  • [8] Epitaxial growth of barium hexaferrite film on wide bandgap semiconductor 6H-SiC by molecular beam epitaxy
    Cai, Z.
    Goodrich, T. L.
    Sun, B.
    Chen, Z.
    Harris, V. G.
    Ziemer, K. S.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2010, 43 (09)
  • [9] Evidence of Structural Strain in Epitaxial Graphene Layers on 6H-SiC(0001)
    Ferralis, Nicola
    Maboudian, Roya
    Carraro, Carlo
    PHYSICAL REVIEW LETTERS, 2008, 101 (15)
  • [10] Epitaxial growth and characterization of GaN films on 6H-SiC by MOVPE
    Nam, OH
    Gim, G
    Park, D
    Yoo, JB
    Kum, DW
    COMPOUND SEMICONDUCTORS 1995, 1996, 145 : 161 - 166