Optical Characteristics of Strontium Titanate Films Obtained by the Sol-Gel Method

被引:3
|
作者
Stas'kov, N. I. [1 ]
Sotskii, A. B. [1 ]
Sotskaya, L. I. [2 ]
Ivashkevich, I. V. [1 ]
Kulak, A. I. [3 ]
Gaponenko, N. V. [4 ,5 ]
Rudenko, M. V. [4 ]
Petlitskii, A. N. [6 ]
机构
[1] Kuleshov State Univ, Mogilev 212022, BELARUS
[2] Belarusian Russian Univ, Mogilev 212000, BELARUS
[3] Natl Acad Sci Belarus, Inst Gen & Inorgan Chem, Minsk 220076, BELARUS
[4] Belarusian State Univ Informat & Radioelect, Minsk 220000, BELARUS
[5] Natl Nucl Res Univ, Moscow Engn & Phys Inst, Moscow 115409, Russia
[6] OAO Integral, Belmikrosistemy Res & Dev Ctr, Minsk 220108, BELARUS
关键词
SRTIO3; THIN-FILMS; SUBSTRATE;
D O I
10.1134/S0030400X18100247
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Using data of multiangle spectrophotometry and spectral ellipsometry in the UV and visible ranges, spectra of the refractive indices and absorption coefficients and width of the forbidden band of one- and five-layer strontium titanate films obtained by the sol-gel method have been calculated. Layer-by-layer deposition of sol on quartz substrates, from one to five layers, leads to an increase in film porosity from 4 to 33%. This causes a decrease in the refractive indices in the middle part of the visible spectrum from 2.33 to 1.87, which leads to a decrease in the reflectance and an increase in the transmittance or transparency of five-layer films. With an increase in the heating temperature of such films from 500 to 750 degrees C, a shift of the absorption band maximum from 239 to 253 nm takes place and the optical width of the forbidden band decreases from 4.63 to 4.20 eV. The absorption band maximum of the single-layer film falls on the wavelength of 252nm, and its optical width of the forbidden band is 3.96 eV.
引用
收藏
页码:492 / 498
页数:7
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