Development of Atmospheric Pressure Plasma Jet with Slit Nozzle

被引：2

作者：

Oshima, Nobuaki ^{[1
]}

Takada, Ryuji ^{[1
]}

Kubota, Yusuke ^{[1
]}

Abraha, Petros ^{[2
]}

Hara, Tamio ^{[1
]}

机构：

[1] Toyota Technol Inst, Xray Laser & Plasma Engn Lab, Nagoya, Aichi 4688511, Japan

[2] Meijo Univ, Fac Sci & Technol, Nagoya, Aichi 4688502, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2011年 / 50卷 / 01期

关键词：

FILMS;

D O I：

10.1143/JJAP.50.01AH06

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A wide flame atmospheric pressure plasma jet has been developed by using a slit nozzle for large area treatment of surfaces. The width of the plasma treated surfaces has been broadened to more than 5 times that obtained by conventional nozzle. The proper function of the slit nozzle towards surface treatment is confirmed by evaluating contact angles of water on polyethylene (PE) surface upon treatment by nitrogen atmospheric plasma jet. A thin film has also been deposited on a glass substrate by introducing hexamethyldisiloxane (HMDSO) into the plasma. The width of the thin film matched with the width of the slit confirming the success of our approach towards attaining a viable large area atmospheric plasma jet for various surface treatments. (C) 2011 The Japan Society of Applied Physics

引用

页数：3

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