Interferometric testing for large optical elements

被引:0
|
作者
Han, CY [1 ]
Zhang, XH [1 ]
Zhang, SH [1 ]
Ma, J [1 ]
Wu, DH [1 ]
Zhang, B [1 ]
机构
[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130022, Peoples R China
关键词
optical testing; interferometry; large optics;
D O I
10.1117/12.402814
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Three interfetometric methods for testing the large concave spherical mirrors with long radius of curvature, the large convex spherical and flat surfaces and the large aspherical mirrors are described respectively. A number of testing results obtained with each form of interferometer are presented.
引用
收藏
页码:269 / 276
页数:8
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