Geometrical error correction research in high precision 2-D laser measuring instrument

被引：0
|
作者：
Zhang Xiao-man [1 ]
Xue Zi [2 ]
Wang He-yan [2 ]
机构：
[1] China Jiliang Univ, Hangzhou 310018, Zhejiang, Peoples R China
[2] Natl Inst Metrol, Beijing 100013, Peoples R China
来源：
6TH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION | 2010年 / 7544卷
关键词：
geometrical error; 2-D measurement; error compensation; coordinates transformation; perpendicularity; grid plates;
D O I：
10.1117/12.885566
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A high precision 2-D laser measuring instrument is designed to meet the needs of high precision measurement. Through the error analysis of the measuring system, the geometrical errors show certain stability in the results. Geometrical correction methods are intensively researched. The angle between two axes of the measured plate and axes of the instrument produces deviations of coordinates X and Y of the points on the plate. Different coordinate systems are not roughly aligned. An inclined correction model is proposed to compensate the deviations and transform the coordinate systems. Then the perpendicular compensation model is proposed using the least square approximation method and the relationship between the coordinates X and Y. To reduce the effect of random error and other geometrical errors, a multi-position correction algorithm is presented through two different measuring positions. The measurement results verify that these methods and models are accurate and feasible.
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页数：8
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