Real-time wavelength corrected heterodyne laser interferometry

被引：10

作者：

Joo, Ki-Nam ^{[1
,2
]}

Ellis, Jonathan D. ^{[2
]}

Spronck, Jo W. ^{[2
]}

Schmidt, Robert H. Munnig ^{[2
]}

机构：

[1] Mitutoyo Res Ctr Europe BV, NL-5684 PJ Best, Netherlands

[2] Delft Univ Technol, PME Mechatron Syst Design, NL-2628 CD Delft, Netherlands

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2011年 / 35卷 / 01期

关键词：

Heterodyne laser interferometer; Refractive index compensation; Fabry-Perot cavity; Displacement; Wavelength tracker; UPDATED EDLEN EQUATION; REFRACTIVE-INDEX; AIR; LENGTH;

D O I：

10.1016/j.precisioneng.2010.06.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We describe the combined methods of displacement heterodyne laser interferometry with wavelength tracking based on a Fabry-Perot cavity to correct the instantaneous wavelength in air The optical frequency of the interferometry source was locked to the resonance peak of an open cavity directly linking the refractive index changes to frequency changes Using this method refractive index changes are compensated by an appropriate change in the laser frequency in real time eliminating the limitations with environmental parameter measurement bandwidth uncertainties associated with equation-based corrections In this paper the principles of the system are explained and experimental results showed a difference of 2 nm compared with traditional equation based techniques The measurement uncertainty and practical considerations for implementation are also discussed (C) 2010 Elsevier Inc All rights reserved

引用

页码：38 / 43

页数：6

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