Fabrication of lightweight silicon x-ray mirrors for high-resolution x-ray optics

At NASA Goddard Space Flight Center, we consistently produce affordable lightweight sub-arcsecond X-ray mirrors made of directly polished single crystal silicon. Silicon is favored for its high stiffness, low density, high thermal conductivity, zero internal stress, and commercial availability. Our manufacturing process includes traditional grinding, lapping, and polishing methods adapted to X-ray mirror geometry. These mirrors promise to meet the stringent requirements of various planned X-ray telescope missions. Presently, we are refining the many steps involved in our manufacturing process. This paper reports an overview of our mirror manufacturing process and the most recent results.