Low-energy electron beam source

被引:2
|
作者
Gleizer, Joseph Z. [1 ]
Vekselman, Vladislav [1 ]
Yatom, Shurik [1 ]
Felsteiner, Joshua [1 ]
Krasik, Yakov E. [1 ]
机构
[1] Technion Israel Inst Technol, Dept Phys, IL-32000 Haifa, Israel
来源
关键词
electron beam; plasma; hollow anode; ferroelectric; FERROELECTRIC-PLASMA-SOURCE; HOLLOW-ANODE; GENERATION; CATHODE; ION; EMISSION; DIODE; GUN;
D O I
10.1080/10420150.2011.566874
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
Experimental results of research into a ferroelectric-plasma-source-assisted hollow anode (HA) discharge as a source of low-energy electron beams are presented. To generate electron beams, the HA auto-bias negative voltage was achieved by the discharge current flowing through the resistor connecting the HA and the grounded electrode. It is shown that this method allows reliable and reproducible generation of low-energy electron beams with electron energy of several hundreds of eV, electron current density up to several A/cm(2) and pulse duration of several tens of microseconds.
引用
收藏
页码:389 / 398
页数:10
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