Monte Carlo simulation of X-ray spectra from low energy electrons using optical data

被引：4

作者：

Roet, D. ^{[1
]}

Van Espen, P. ^{[1
]}

机构：

[1] Univ Antwerp, Dept Chem, CDE, B-2610 Antwerp, Belgium

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2010年 / 268卷 / 17-18期

关键词：

Monte Carlo simulation; Electron microscopy; X-rays; Optical data; Inner shell ionization; Bremsstrahlung; Mott cross section; Variance reduction; MEAN FREE PATHS;

D O I：

10.1016/j.nimb.2010.07.004

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An approach using optical data to simulate both the bremsstrahlung continuum and characteristic K and L X-ray lines generated by low energy electrons (cfr electron microscopy) in solids is discussed in this paper. The necessary analytical expressions together with the data to calculate the relevant cross sections for elastic and inelastic interactions at these energies along with variance reduction techniques are given. The results of the Monte Carlo simulation are compared to experimental data measured with a JEOL 6300 electron microscope (C) 2010 Elsevier B.V. All rights reserved

引用

页码：2794 / 2800

页数：7

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