Electrical characteristics of barium-strontium titanate thin-film capacitor

被引：0
|
作者：
Li, B [1 ]
Lai, PT [1 ]
Chen, P [1 ]
Huang, MQ [1 ]
Li, GQ [1 ]
机构：
[1] S China Univ Technol, Dept Appl Phys, Guangzhou, Peoples R China
来源：
2003 IEEE CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS | 2003年
关键词：
D O I：
10.1109/EDSSC.2003.1283485
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The electrical characteristics of barium-strontium titanate (Ba1-xSrxTiO3) thin-film capacitor are investigated and the effects of oxygen annealing conditions (annealing time and annealing temperature) on dielectric constant are studied. Experimental results show that the dielectric constant of the thin film decreases with increasing annealing time, but increases with increasing annealing temperature. These facts can be explained by the microstructure analysis and the polarization theory.
引用
收藏
页码：67 / 70
页数：4
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