Characteristics of DLC/oxynitriding duplex-treated V8 tool steel by DC-pulsed PECVD

被引：6

作者：

Chang, Shih-Hsien ^{[1
]}

Lai, Yu-Cheng ^{[1
]}

Huang, Kuo-Tsung ^{[2
]}

Liu, Chung-Ming ^{[3
,4
]}

机构：

[1] Natl Taipei Univ Technol, Dept Mat & Mineral Resources Engn, 1,Sect 3,Zhongxiao E Rd, Taipei 10608, Taiwan

[2] Natl Kangshan Agr Ind Senior High Sch, Dept Automech, Kaohsiung, Taiwan

[3] China Med Univ, Sch Dent, Taichung, Taiwan

[4] China Med Univ Hosp, Biomed Technol R&D Ctr, Taichung, Taiwan

来源：

SURFACE ENGINEERING | 2020年 / 36卷 / 05期

关键词：

DLC; DC-pulsed plasma enhanced CVD; oxynitride; Vanadis 8 tool steel; hydrophobic; HIGH-SPEED STEEL; DLC FILMS; DEPOSITION; WEAR; IMPROVEMENT; COATINGS;

D O I：

10.1080/02670844.2019.1635769

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper, DLC films are produced by DC-pulsed plasma enhanced CVD after oxynitride-treating of Vanadis 8 tool steel. The experimental parameters include various Ar gas flows (1, 1.5, 2 and 2.5 sccm) with asymmetric bipolar pulsed voltages, the gas flow of CH4 and a deposition time of 90 min, respectively. The experimental results showed that optimal properties occurred at an appropriate argon gas flow of 1.5 sccm. The wear tests showed the lowest wear loss volume when loads of 2 and 5 N were 3.81 x 10(-3) and 4.01 x 10(-3 )mm(3), respectively. Meanwhile, the hardness of the DLC film was 17.78 GPa and the elastic modulus was 191.63 GPa, respectively. Moreover, the water contact angle was 78.11 degrees, which indicated that the DLC films could make Vanadis 8 tool steel more hydrophobic.

引用

页码：516 / 523

页数：8

共 7 条

[1] Deposition of DLC Films onto Oxynitriding-Treated V4E High Vanadium Tool Steel through DC-Pulsed PECVD Process
Chang, Shih-Hsien
Wu, Wei-Chen
Huang, Kuo-Tsung
Liu, Chung-Ming
[J]. MATERIALS TRANSACTIONS, 2017, 58 (05) : 806 - 812
[2] Investigation of the characteristics of DLC films on oxynitriding-treated ASP23 high speed steel by DC-pulsed PECVD process
Chang, Shih-Hsien
Tang, Te-Chien
Huang, Kuo-Tsung
Liu, Chung-Ming
[J]. SURFACE & COATINGS TECHNOLOGY, 2015, 261 : 331 - 336
[3] Improvement of the Wear and Corrosion Behaviors of DLC/oxynitriding Duplex-treated PM60 High-speed Steel via Various Power Densities of DC-pulsed Plasma Enhanced CVD
Chang, Shih-Hsien
Huang, Chi-Long
Huang, Kuo-Tsung
Liu, Chung-Ming
[J]. ISIJ INTERNATIONAL, 2016, 56 (12) : 2276 - 2283
[4] Improvement of the Tribological Properties of DLC/oxynitriding Duplex-treated AISI H13 Alloy Steel
Chang, Shih-Hsien
Lee, Chun I.
Huang, Kuo-Tsung
[J]. ISIJ INTERNATIONAL, 2014, 54 (01) : 193 - 198
[5] Optimization of DLC films on oxynitriding-treated Vanadis 10 tool steel through the various duty cycles of DC-pulsed plasma-enhanced CVD
Chang, S. -H.
Wen, Y. -C.
Huang, K. -T.
Liu, C. -M.
[J]. KOVOVE MATERIALY-METALLIC MATERIALS, 2021, 59 (02): : 109 - 118
[6] Enhancement of the Wear and Corrosion Resistance of DLC/oxynitriding Duplex-treated PM30 Steel by the Asymmetric Bipolar-pulsed Plasma Enhanced CVD
Chang, Shih-Hsien
Peng, Chang-Kai
Huang, Kuo-Tsung
Liu, Chung-Ming
[J]. ISIJ INTERNATIONAL, 2018, 58 (08) : 1510 - 1518
[7] Wear and Corrosion Resistance of CrN Films on Oxynitriding-treated Vanadis 8 Tool Steel via the DC Magnetron Sputtering Process
Chang, Shih-Hsien
Yu, Meng-Hsun
Huang, Kuo-Tsung
[J]. ISIJ INTERNATIONAL, 2022, 62 (01) : 218 - 226

← 1 →