Effect of laser intensity changing on accuracy of size measurement by laser scanning

被引：0
|
作者：
Jiang, T [1 ]
Yu, ZL [1 ]
Cao, GH [1 ]
Xu, HJ [1 ]
机构：
[1] Changchun Univ Sci & Technol, Coll Electromech Engn, Changchun 130022, Peoples R China
来源：
OPTOELECTRONIC DEVICES AND INTEGRATION, PTS 1 AND 2 | 2005年 / 5644卷
关键词：
intensity of laser; laser scanning; size measurement;
D O I：
10.1117/12.577452
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In the system of size measurement by laser scanning, the laser intensity is necessarily kept stability. But in practice, output intensity of laser is continuously attenuated as time passed, so that precision accuracy of detecting system becomes poor. The paper analyzes the effect of laser intensity changing on accuracy of size measurement by laser scanning, provides with the auto-measured circuit and the measuring methods of the output laser intensity, and the method of electrical compensation for intensity change. The method has been applied to the instrument of diameter measurement by laser scanning on line successfully, which is effective and feasible.
引用
收藏
页码：195 / 198
页数：4
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