Effect of deposition conditions on physical properties of SnO2 thin films prepared using the spray pyrolysis technique

In this study, physical properties of tin oxide thin films, which are prepared using the spray pyrolysis technique, have been analyzed. The effects of substrate temperature and precursor molarity on optoelectrical and structural properties of the films have been investigated. X-ray diffraction analysis revealed a polycrystalline nature with tetragonal structure. It also showed that the preferential growth directions of the films were dependent on the deposition conditions. By using scanning electron microscopy analysis, the surface morphology of the films was observed as an effect of the variation of deposition conditions. The optical and electrical properties of the films were studied by transmission spectra and Hall effect measurement, respectively. Films of about 6 x 10(-3) Omega cm resistivity and high visible transparency of about 86% have been obtained at the optimum substrate temperature of 550 degrees C and precursor molarity of 0.3 mol/L.