Vibrational properties of nitrogen-doped ultrananocrystalline diamond films grown by microwave plasma CVD

被引:52
|
作者
Vlasov, I. I. [1 ]
Goovaerts, E. [2 ]
Ralchenko, V. G. [1 ]
Konov, V. I. [1 ]
Khomich, A. V. [3 ]
Kanzyuba, M. V. [1 ]
机构
[1] Inst Gen Phys, Moscow 119991, Russia
[2] Univ Antwerp, Dept Phys, B-2610 Antwerp, Belgium
[3] Inst Radio Engn & Elect, Fryazino 141190, Moscow Region, Russia
基金
俄罗斯基础研究基金会;
关键词
ultrananocrystalline diamond (UNCD); nitrogen; vibrational properties characterization;
D O I
10.1016/j.diamond.2007.07.007
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ultrananocrystalline diamond (UNCD) films grown in an argon-rich Ar/CH(4)/H(2) microwave plasma with nitrogen gas added in amounts of 0%-20% were studied by Raman spectroscopy with multiple excitation wavelengths in the range of 244-647 nm and by optical absorption in UV-visible. The Raman spectra have demonstrated the presence of diamond, amorphous carbon and polyacetylene in the UNCD films. Analysis of vibrational and optical properties of amorphous carbon phase proves that nitrogen stimulates the trarisition from amorphous carbon into an ordered graphite-like structure with narrowed optical band gap, which is supposed to be responsible for the high electrical conductivity of the N-doped UNCD. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:2074 / 2077
页数:4
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