The Design and Simulation of Vibratory Ring Gyroscope

被引：0
|
作者：
Meng, Meiyu [1 ]
Zhang, Wendong [1 ]
机构：
[1] North Univ China, Key Lab Instrumentat Sci & Dynam Measurement, Minist Educ, Taiyuan 030051, Peoples R China
来源：
MICRO-NANO TECHNOLOGY XV | 2014年 / 609-610卷
关键词：
Vibratory ring gyroscope; Capacitance; Resisting vibration; Q factor;
D O I：
10.4028/www.scientific.net/KEM.609-610.1029
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper deals with design and simulation of vibratory ring gyroscope which has good performance as resisting vibration, resisting impact, small temperature drift because of the inherent symmetry of structure. The good performance of gyroscope has verified by detailed modeling and simulation. The manufacture of gyroscope using wafer level vacuum packaging technology making the gyroscope has high quality factor. At last we test the gyroscope and the Q factor is 20300 by detecting the resonant state of the gyroscope.
引用
收藏
页码：1029 / 1032
页数：4
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