Femtosecond laser-assisted etching: making arbitrary shaped 3D glass micro-structures

被引：1
|
作者：
Jonusauskas, Linas [1 ,2 ]
Tickunas, Titas [1 ,2 ]
Narmontas, Andrius [1 ]
Nemickas, Gedvinas [1 ]
Purlys, Vytautas [1 ,2 ]
Grigaleviciute, Giedre [1 ]
Gadonas, Roaldas [1 ,2 ]
机构：
[1] Femtika Ltd, Sauletekio Ave 15, LT-10224 Vilnius, Lithuania
[2] Vilnius Univ, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, Lithuania
来源：
LASER-BASED MICRO- AND NANOPROCESSING XII | 2018年 / 10520卷
关键词：
Femtosecond laser; 3D glass structuring; selective etching; fused silica; microfluidics; soft lithography; lab on chip; microneedles; HIGH-PERFORMANCE; FUSED-SILICA; ABLATION; MICROFABRICATION; NANOSECOND; NANOSCALE;
D O I：
10.1117/12.2286906
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
With fast development of interdisciplinary fields relying on various micro-and nano-structures (for instance, microfluidics, micromechanics or biomedicine) the pressure is on for the fabrication technologies to meet the ever increasing demands for the manufacturing throughput and applicable materials. Glass is one of the key substances used through the ages for creation of various objects, yet till this day the possibilities to process it in micro-scale in 3D fashion is limited. Here, we provide examples of structures that can be created out of glass by applying fs laser assisted selective etching. These include molds for micromechanical part creation, high-quality microchannels and microneedle arrays. The possibilities, limitations and perspectives of this microfabrication technology are discussed, comparisons with additive manufacturing are provided.
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页数：8
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