Nucleation of diamond by pure carbon ion bombardment - a transmission electron microscopy study

被引：10
|
作者：
Yao, Y
Liao, MY
Wang, ZG
Lifshitz, Y
Lee, ST [1 ]
机构：
[1] City Univ Hong Kong, Ctr Super Diamond & Adv Films COSDAF, Hong Kong, Hong Kong, Peoples R China
[2] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China
[3] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
[4] Technion Israel Inst Technol, Dept Mat Engn, IL-32000 Haifa, Israel
来源：
APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 06期
关键词：
D O I：
10.1063/1.2007869
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A cross-sectional high-resolution transmission electron microscopy (HRTEM) study of a film deposited by a 1 keV mass-selected carbon ion beam onto silicon held at 800 degrees C is presented. Initially, a graphitic film with its basal planes perpendicular to the substrate is evolving. The precipitation of nanodiamond crystallites in upper layers is confirmed by HRTEM, selected area electron diffraction, and electron energy loss spectroscopy. The nucleation of diamond on graphitic edges as predicted by Lambrecht [W. R. L. Lambrecht, C. H. Lee, B. Segall, J. C. Angus, Z. Li, and M. Sunkara, Nature, 364 607 (1993)] is experimentally confirmed. The results are discussed in terms of our recent subplantation-based diamond nucleation model. (c) 2005 American Institute of Physics.
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页数：3
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