Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design

被引：31

作者：

Schroedter, Richard ^{[1
]}

Roth, Matthias ^{[2
]}

Janschek, Klaus ^{[2
]}

Sandner, Thilo ^{[1
]}

机构：

[1] Fraunhofer Inst Photon Microsyst, Act Microscanner Syst, Maria Reiche Str 2, D-01109 Dresden, Germany

[2] Tech Univ Dresden, Inst Automat, Fac Elect & Comp Engn, D-01062 Dresden, Germany

来源：

MECHATRONICS | 2018年 / 56卷

关键词：

MEMS; Quasi-static/resonant microscanner; Electrostatic staggered vertical comb; Jerk-limited triangle trajectory; Flatness-based open-loop and closed-loop control; Global extended Luenberger observer; MICRO-SCANNING MIRROR; COMB-DRIVE ACTUATOR; MEMS SCANNER; LINEARIZATION; MICROMIRROR; PROJECTION;

D O I：

10.1016/j.mechatronics.2017.03.005

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper describes the open-loop and closed-loop control for quasi-static microscanners exploiting the inherent flatness property. The developed nonlinear control method is verified on a gimbaled quasi-static/resonant scanning micro mirror with electrostatic staggered vertical comb (SVC) drive actuation. Based on a mechatronic micro mirror model, we present a flatness-based feed forward control method using jerk-limited trajectories to reduce undesired oscillations. For the closed-loop control we introduce a stabilizing linearizing feedback including an extended Luenberger observer for improvement of the command tracking in presence of model inaccuracies. The experimental results for both scenarios, open-loop and closed-loop control, are compared with simulations and further assessed in terms of performance and feasibility for industrial application. (C) 2017 Elsevier Ltd. All rights reserved.

引用

页码：318 / 331

页数：14

共 21 条

[1] Closed-loop control for quasi-static MOEMS mirrors
Tortschanoff, A.
Holzmann, D.
Lenzhofer, M.
Sandner, T.
[J]. MOEMS AND MINIATURIZED SYSTEMS XI, 2012, 8252
[2] Closed-loop control driver for quasi-static MOEMS mirrors
Tortschanoff, A.
Holzmann, D.
Lenzhofer, M.
Sandner, T.
Kenda, A.
[J]. MOEMS AND MINIATURIZED SYSTEMS XII, 2013, 8616
[3] Open-loop and closed-loop flow control based on Van der Pol modeling
Motta, Valentina
Malzacher, Leonie
[J]. ACTA MECHANICA, 2018, 229 (01) : 389 - 401
[4] Open-loop and closed-loop flow control based on Van der Pol modeling
Valentina Motta
Leonie Malzacher
[J]. Acta Mechanica, 2018, 229 : 389 - 401
[5] Design and implementation of error control algorithms for bluetooth system: Open-loop and closed-loop algorithms
Park, CH
Paik, JH
You, YH
Ju, MC
Song, HK
[J]. IEEE INTERNATIONAL CONFERENCE ON CONSUMER ELECTRONICS - 2000 DIGEST OF TECHNICAL PAPERS, 2000, : 302 - 303
[6] Flatness-based closed-loop control of a rotating Euler-Bernoulli beam: Experimental results
Barczyk, Martin
Lynch, Alan F.
[J]. 2006 AMERICAN CONTROL CONFERENCE, VOLS 1-12, 2006, 1-12 : 799 - +
[7] A Comparison of Open-Loop and Closed-Loop Adaptive Calibration for Pattern Recognition based Myoelectric Control
He, Jiayuan
Zhang, Dingguo
Sheng, Xinjun
Zhu, Xiangyang
[J]. 2015 37TH ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY (EMBC), 2015, : 1144 - 1147
[8] Nested Closed-Loop Control of Quasi-Static MEMS Scanners With Large Dynamic Range
Frigerio, Paolo
Molinari, Luca
Barbieri, Andrea
Zamprogno, Marco
Mendicino, Gianluca
Boni, Nicolo
Langfelder, Giacomo
[J]. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2023, 70 (04) : 4217 - 4225
[9] Flatness based trajectory planning and open-loop control of shallow-water waves in a tube
Kopp, Justus
Woittennek, Frank
[J]. AUTOMATICA, 2020, 122
[10] A comparison of open-loop feedforward and closed-loop methods for active noise control using volume velocity minimization
Kamman, JW
Naghshineh, K
[J]. APPLIED ACOUSTICS, 1999, 57 (01) : 29 - 37

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