Rigorous Coupled Wave Analysis of Surface Plasmon Resonance Sensor Based on Metallic Grating

Since the development almost a decade ago of the first biosensor based on surface plasmon resonance (SPR), the use of this technique has increased steadily. In this study, we theoretically investigated the sensing character of SPR sensor with reflection type metallic with Rigorous Coupled Wave Analysis (RCWA) method, and the mechanism is analyzed by the field distribution. It is found that the sensitivity of negative diffraction order, which goes higher quickly as the resonant angle increases, is much greater than that of positive diffraction order.