[1] Univ Appl Sci Jena, Carl Zeiss Promenade 2, D-07745 Jena, Germany
[2] Univ Kassel, Inst Nanostruc Technol & Analyt INA, Technol Elect Dept, Heinrich Plett Str 40, D-34132 Kassel, Germany
[3] Fraunhofer Inst Appl Opt & Precis Engn IOF, Albert Einstein Str 7, D-07745 Jena, Germany