Structural, Morphological And Optical Properties Of CeO2 Thin Films Deposited By RF Sputtering

Cerium oxide (CeO2) thin films were deposited on glass substrates by sputtering at various substrate temperatures. CeO2 films were characterized by X-ray diffraction, FESEM, PL and Raman analyses. X-ray diffraction patterns of films reveal fcc cubic structure with preferential orientation along (2 2 0) crystallographic plane. SEM images show that the particles are uniformly distributed on the film surface. The films were found to be well adheared to the substrates and pin holes are not observed on the surface of the films. PL spectra exhibits a strong near band-gap-edge emission and a broad blue, green luminescence, which can be assigned to the presence of Ce and O vacancies, amorphous phases, deep level impurities and structural defects. The relative intensity between the different peaks of the bands related to defects or impurities was studied as a tool for quality control of the films. Moreover, vibrational measurements through Raman analysis were carried out and the results are discussed.