Optical properties of TiO2 and Mn0.2Ti0.8O2 thin films

被引:0
|
作者
Zhang, S [1 ]
Xue, HL [1 ]
Liu, CX [1 ]
Gan, Y [1 ]
Dong, W [1 ]
Zhang, XD [1 ]
Chen, WY [1 ]
机构
[1] Jilin Univ, State Key Lab Integrated Optoelect, Changchun 130023, Peoples R China
关键词
TiO(2); sol-gel process; XRD; UV absorption spectrum;
D O I
10.1117/12.574847
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
TiO(2) and Mn(0.2)Ti(0.8)O(2)thin films were prepared by sol-gel process and their structural and optical properties were examined. The structural properties of samples were investigated by the X-ray diffraction (XRD) and auto force microscope (AFM). The XRD results showed that TiO(2) thin film calcined at 650 degrees C was anatase phase, and Mn(0.2)Ti(0.8)O(2) thin films calcined at the same temperature was rutile. The AFM results of both samples showed quite a smooth surface. Optical properties of samples were examined by UV absorption spectrum. The absorption edge of Mn(0.2)Ti(0.8)O(2) red-shifted.
引用
收藏
页码:161 / 165
页数:5
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