An InxGa1-xN based multiple quantum well structure emitting in the ultraviolet, which has the highest reported efficiency (67%) at its wavelength (380 nm), was analyzed with the three-dimensional atom probe. The results reveal gross discontinuities and compositional variations within the quantum well layers on a 20-100 nm length scale. In addition, the analysis shows the presence of indium in the AlyGa1-yN barrier layers, albeit at a very low level. By comparing with analogous epilayer samples, we suggest that the quantum well discontinuities we observe may play an important role in improving the efficiency of these structures. (c) 2008 American Institute of Physics.
机构:
Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Liu Shi-Ming
Xiao Hong-Ling
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Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Xiao Hong-Ling
Wang Quan
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Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Xian Univ Posts & Telecommun, Sch Elect Engn, Xian 710121, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Wang Quan
Yan Jun-Da
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Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Yan Jun-Da
Zhan Xiang-Mi
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Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Zhan Xiang-Mi
Gong Jia-Min
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Xian Univ Posts & Telecommun, Sch Elect Engn, Xian 710121, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Gong Jia-Min
Wang Xiao-Liang
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Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Beijing Key Lab Low Dimens Semicond Mat & Devices, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Wang Xiao-Liang
Wang Zhan-Guo
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Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
Beijing Key Lab Low Dimens Semicond Mat & Devices, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
机构:
Key Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of SciencesKey Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences
肖红领
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王权
闫俊达
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Key Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of SciencesKey Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences
闫俊达
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占香蜜
巩稼民
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School of Electronic Engineering,Xi'an University of Posts and TelecommunicationsKey Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences
巩稼民
王晓亮
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Key Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences
Beijing Key Laboratory of Low-Dimensional Semiconductor Materials and DevicesKey Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences
王晓亮
王占国
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Key Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences
Beijing Key Laboratory of Low-Dimensional Semiconductor Materials and DevicesKey Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences
机构:
Univ Calif Berkeley, Lawrence Berkeley Lab, Natl Ctr Electron Microscopy, Berkeley, CA 94720 USAUniv Calif Berkeley, Lawrence Berkeley Lab, Natl Ctr Electron Microscopy, Berkeley, CA 94720 USA
Kisielowski, C.
Bartel, T. P.
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Univ Calif Berkeley, Lawrence Berkeley Lab, Natl Ctr Electron Microscopy, Berkeley, CA 94720 USAUniv Calif Berkeley, Lawrence Berkeley Lab, Natl Ctr Electron Microscopy, Berkeley, CA 94720 USA