Autofocusing method for high-resolution three-dimensional profilometry

被引:0
|
作者
Hu, Xiaowei [1 ,2 ]
Wang, Guijin [2 ]
Hyun, Jae-Sang [1 ]
Zhang, Yujin [2 ]
Yang, Huazhong [2 ]
Zhang, Song [1 ]
机构
[1] Purdue Univ, Sch Mech Engn, W Lafayette, IN 47907 USA
[2] Tsinghua Univ, Dept Elect Engn, Beijing 100084, Peoples R China
关键词
SHAPE MEASUREMENT; MICROSCOPY;
D O I
10.1364/OL.382431
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
State-of-the-art high-accuracy three-dimensional (3D) profilometry systems typically use a lens with a fixed focal length, making it difficult for them to measure scenes with large depth variations, especially dynamically changing ones. To address this need, this Letter proposes a novel, to the best of our knowledge, autofocusing method for high-resolution 3D profilometry with a digital fringe projection technique by (1) developing a novel continuous geometric parameter model for systems using electrically tunable lenses and (2) employing a focal plane detection algorithm. The validity of the proposed method is confirmed, by experiments. (C) 2020 Optical Society of America
引用
收藏
页码:375 / 378
页数:4
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