Data Analytics in Semiconductor Industry

被引：0
|
作者：
Wang, David [1 ]
机构：
[1] MKS Umetr Asia, Blk 4012 Ang Mo Kio Ave 10,Unit 07-07 Techplace 1, Singapore 569628, Singapore
来源：
2015 Joint e-Manufacturing and Design Collaboration Symposium (eMDC) & 2015 International Symposium on Semiconductor Manufacturing (ISSM) | 2015年
关键词：
Wafer; Batch statistical process control; batch process model; PCA; PLS; batch process monitoring;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页数：4
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