Development of finite element model for new type composite piezoelectric material

Microelectromechanical systems are used in various applications, like safety systems, switches, mechanical filters, detection and tracking of various substances, etc. Microresonators, as microelectromechanical systems, are fundamental components integrated in various micro(opto)-electromechanical systems. They are designed using composite piezoelectric material. Composite piezoelectric layer allows to measure natural frequency changes by indirect measurement of generated electrical signal. Therefore, to efficiently analyse the piezoelectric material a finite element method has to be created. A piezoelectric layer allows to create a novel microresonator with controllable parameters, which could assure much higher functionality of microelectromechanical systems. Finite element model of a new type piezoelectric material with electro-optic feedback is proposed.