PID Controller Based Intelligent Fuzzy Control of a SPM System Design

被引:0
|
作者
Lin, Jium-Ming [1 ]
Chang, Po-Kuang [1 ]
机构
[1] Chung Hua Univ, Coll Engn, Program Engn Sci, 707,Sec 2 Wu Fu Rd, Hsinchu 30012, Taiwan
关键词
Ziegler-Nichols PID controller; PID Fuzzy controller; SPM; Hysteresis effect; LVT; FORCE MICROSCOPY;
D O I
暂无
中图分类号
TP18 [人工智能理论];
学科分类号
081104 ; 0812 ; 0835 ; 1405 ;
摘要
This research is to use Ziegler-Nichols PID controller as a basement for the fuzzy controller design in a Scanning Probe Microscope (SPM) to reduce the hysteresis effect. Comparing the results with a previous design for the outer-loop with PI compensator are also made, one can see that the proposed system is more robust.
引用
收藏
页码:258 / +
页数:2
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