Plasma nanotechnology: past, present and future

被引:67
|
作者
Meyyappan, M. [1 ]
机构
[1] NASA, Ames Res Ctr, Moffett Field, CA 94035 USA
关键词
WALLED CARBON NANOTUBES; CHEMICAL-VAPOR-DEPOSITION; METAL-OXIDE NANOWIRES; GLOW-DISCHARGE; BULK SYNTHESIS; GROWTH; FUNCTIONALIZATION; HYDROGEN; ARRAYS; FLUORINATION;
D O I
10.1088/0022-3727/44/17/174002
中图分类号
O59 [应用物理学];
学科分类号
摘要
Low-temperature plasmas find numerous applications in growth and processing of nanomaterials such as carbon nanotubes, inorganic nanowires and others. This paper provides an overview of the history, current status of the literature, challenges ahead in some of the technical areas and the potential for plasma-grown nanomaterials in various nanotechnology applications.
引用
收藏
页数:11
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