Split-CV for pseudo-MOSFET characterization: experimental setups and associated parameter extraction methods

被引：0

作者：

Pirro, L. ^{[1
]}

Ionica, I. ^{[1
]}

Ghibaudo, G. ^{[1
]}

Cristoloveanu, S. ^{[1
]}

机构：

[1] IMEP LAHC, Grenoble, France

来源：

2014 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES (ICMTS) | 2014年

关键词：

SOI; pseudo-MOSFET; mobility extraction; split-CV; probe effects; BARE SOI WAFERS;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

We examine in detail the experimental setup for fast, in situ characterization of bare SOI substrates using the pseudo-MOSFET technique. Two main experimental conditions are analyzed: the back contact between the SOI wafer and the metal chuck, and the influence of probes placement (location and pressure) on the die surface. Static I-V and split-CV measurements are reported and the parameter extraction methods are update. We focus on the carrier mobility and define pragmatic guidelines for simple and accurate extraction.

引用

页码：14 / 19

页数：6

共 4 条

[1] A new characterization technique for SOI wafers: Split C(V) in pseudo-MOSFET configuration
Diab, A.
Fernandez, C.
Ohata, A.
Rodriguez, N.
Ionica, I.
Bae, Y.
Van den Daele, W.
Allibert, F.
Gamiz, F.
Ghibaudo, G.
Mazure, C.
Cristoloveanu, S.
SOLID-STATE ELECTRONICS, 2013, 90 : 127 - 133
[2] Effective Capacitance Area for Pseudo-MOSFET Characterization of Bare SOI Wafers by Split-C(V) Measurements
Fernandez, Cristina
Rodriguez, Noel
Ohata, Akiko
Gamiz, Francisco
Cristoloveanu, Sorin
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2013, 2 (12) : P529 - P533
[3] Determination of Effective Capacitance Area for Pseudo-MOSFET Based Characterization of Bare SOI Wafers by Split-C(V) Measurements
Fernandez, C.
Rodriguez, N.
Ohata, A.
Diab, A.
Gamiz, F.
Cristoloveanu, S.
ADVANCED SEMICONDUCTOR-ON-INSULATOR TECHNOLOGY AND RELATED PHYSICS 16, 2013, 53 (05): : 209 - 217
[4] Electrical characterization of ultra-thin silicon-on-insulator substrates: static and split C-V measurements in the Pseudo-MOSFET configuration
Pirro, L.
Diab, A.
Ionica, I.
Ghibaudo, G.
Cristoloveanu, S.
2013 INTERNATIONAL CONFERENCE ON SEMICONDUCTOR TECHNOLOGY FOR ULTRA LARGE SCALE INTEGRATED CIRCUITS AND THIN FILM TRANSISTORS (ULSIC VS. TFT 4), 2013, 54 (01): : 203 - 208

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