Detection of volatile organic compounds (VOCs) with polymer coated cantilevers

被引：0
|
作者：
Maute, M [1 ]
Raible, S [1 ]
Ulmer, H [1 ]
Prins, FE [1 ]
Weimar, U [1 ]
Kern, DP [1 ]
Göpel, W [1 ]
机构：
[1] Univ Tubingen, Inst Appl Phys, D-72076 Tubingen, Germany
来源：
EUROSENSORS XII, VOLS 1 AND 2 | 1998年
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D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Changes in the resonance frequency of polymer coated cantilevers due to gas absorption can be used as a detection mechanism for gases. An additional mass loading of the cantilever results in a decrease of the resonance frequency. In this approach me prepared cantilevers based on micromachined Si wafers and used polydimethylsiloxane (PDMS) as polymeric prototype coating. PDMS is known to exhibit high selectivity to volatile organic compounds (VOCs). By using the first higher resonance mode we found with our configuration a sensitivity of -0.049Hz/ppm for n-octane.
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页码：1083 / 1086
页数：4
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