Organic-inorganic composites for THz device fabrication

被引:0
|
作者
Cai, B. [1 ,2 ]
Ye, T. M. [1 ]
Bo, G. [1 ]
Wang, X. C. [1 ]
Li, Y. Z. [1 ]
Zhu, Y. M. [1 ]
Sugihara, O. [2 ]
机构
[1] Univ Shanghai Sci & Technol, Shanghai Key Lab Modern Opt Syst, Engn Res Ctr Opt Instrument & Syst, Minist Educ, Jungong Rd 516, Shanghai 200093, Peoples R China
[2] Utsunomiya Univ, Grad Sch Engn, Utsunomiya, Tochigi 3218585, Japan
关键词
organic-inorganic composite; THz filter; Rayleigh scattering; refractive index; antireflection; hot-emboss; TERAHERTZ FREQUENCY-RANGE; HIGH REFRACTIVE-INDEX; TECHNOLOGY; WAVE;
D O I
10.1117/12.2218782
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this paper, several organic-inorganic composites were prepared for Terahertz (THz) devices fabrication. First, a two-layer structure was designed for femtosecond (fs) laser/THz radiation separation. The top layer was made by sintered 20-40 nm hollow quartz particles which can diffuse the incident fs laser thus decrease the power intensity. The bottom layer comprised of silicon 100 nm particles and cycle-olefine polymer (COP), by which the fs laser light can be greatly scattered and absorbed but THz radiation can propagate insusceptibly. With this two-layer structure a high efficient fs-laser/THz filter was fabricated successfully. Second, titania-polymer composites with a very high refractive-index tunability and high transparency in the THz region were prepared. By controlling the blending ratio of the titania particle, a broad refractive-index tuning range from 1.5 to 3.1 was realized. Then, the composites were used to fabricate antireflective (AR) layers on a high-resistivity silicon (HR-Si) substrate. By utilizing the thermoplasticity of the titania-polymer composite, a graded-index structure was fabricated via a hot-embossing method. Because of the good refractive-index matching between the composite and the HR-Si substrate, a broadband AR layer was fabricated.
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页数:7
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