Curvature measurement of optical surface using digital holography

被引：12

作者：

Wang, Fanjing ^{[1
]}

Xiao, Wen ^{[1
]}

Pan, Feng ^{[1
]}

Liu, Shuo ^{[1
]}

Cong, Lin ^{[1
]}

Li, Rui ^{[1
]}

Rong, Lu ^{[1
]}

He, Aga ^{[1
]}

机构：

[1] Beihang Univ, Sch Instrument Sci & Optoelect Engn, Beijing 100191, Peoples R China

来源：

OPTICS AND LASERS IN ENGINEERING | 2011年 / 49卷 / 07期

基金：

美国国家科学基金会;

关键词：

Digital holography; Optical component; Curvature radius; Least-square method; NUMERICAL RECONSTRUCTION; MICROSCOPY; MICROLENSES;

D O I：

10.1016/j.optlaseng.2011.02.012

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, an optical surface curvature measurement technique based on digital holography is proposed. Unlike the previous digital holographic methods, which only involve a small part of the measured data for parameter estimation, the proposed method adopts more of them using least square method. Hence, the analyzed result is not affected by data extraction direction and less sensitive to imperfect phase compensation. The proposed method is demonstrated with a sample of reflection mirror in laser resonator, and verified by comparing the measurement result with that of the white light interferometer. (C) 2011 Elsevier Ltd. All rights reserved.

引用

页码：903 / 906

页数：4

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