Investigation and optimization of polarization properties of self-assembled carbon nanotube films

被引:3
|
作者
Zhang, Hui [1 ,2 ]
Wang, Yibin [1 ,2 ]
Zhang, Peng [1 ,2 ]
Hou, Huwang [2 ,3 ]
Zhao, Yang [1 ,2 ]
机构
[1] Univ Sci & Technol China, CAS Key Lab Mech Behav & Design Mat, Dept Precis Machinery & Precis Instrumentat, Hefei 230027, Anhui, Peoples R China
[2] Univ Sci & Technol China, Key Lab Precis Sci Instrumentat Anhui Higher Educ, Hefei 230027, Anhui, Peoples R China
[3] Univ Sci & Technol China, Dept Modern Mech, Hefei 230026, Anhui, Peoples R China
基金
中国国家自然科学基金;
关键词
carbon nanotube forest; water-assistant chemical vapor deposition; polarization control; CNT film thickness; nanotube alignment; growth defects of CNT; FABRICATION; GROWTH;
D O I
10.1088/1361-6528/ac4d56
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Super-aligned carbon nanotubes (CNTs) film has strong anisotropy to light propagation. In order to better integrate the self-assembled CNTs into microelectromechanical system (MEMS) for polarization applications, some inherent impacts on polarization properties of CNT film were investigated. We described the polarization effects of the film thickness variation in detail, giving an optimum thickness range which is around 700-800 nm. The amorphous carbon content of CNT film was reduced by oxidation process where the transmittance increased by almost 4 folds. The alignment of CNT arrangement was optimized from 0.41 (Chebyshev orientation parameter) to 0.54 by manipulating the C2H4 flow rate from 54 to 80 sccm. More specifically, a sample possessing a degree of polarization up to 99% and transmittance over 45% was obtained through proper regulations. The validated optimization makes the aligned CNT films more feasible and valuable for the integration of the CNT polarimeters with MEMS technology.
引用
收藏
页数:9
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