Acetone vapour sensing characteristics of cobalt-doped SnO2 thin films

被引:103
|
作者
Patil, Shriram B.
Patil, P. P.
More, Mahendra A. [1 ]
机构
[1] N Maharashtra Univ, Dept Phys, Sch Phys Sci, Jalgaon 425001, India
[2] Univ Pune, Dept Phys, Ctr Adv Studies Mat Sci & Solid State Phys, Pune 411007, Maharashtra, India
关键词
gas sensor; spray pyrolysis; acetone vapour; SnO2; Co3O4;
D O I
10.1016/j.snb.2007.01.047
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Gas sensing behaviour of cobalt-doped tin oxide (Co-SnO2) thin films, synthesized by conventional spray pyrolysis technique, has been investigated for carbon dioxide, oxygen and acetone vapour. Structural and elemental analysis of the Co-SnO2 films was carried out by X-ray diffraction (XRD), scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDAX). The XRD spectrum revealed the polycrystalline nature of the film with a mixed phase comprising of SnO2 and CO3O4. The surface morphology, as seen in the SEM image, was observed to be granular, uniformly covering the entire substrate surface. The gas/vapour sensing studies performed in dry air at different temperatures in the range of 50-300 degrees C indicated better sensing characteristics for acetone vapour as compared to carbon dioxide and oxygen gases. The influence of cobalt concentration and operating temperature on the sensor performance has also been investigated. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:126 / 130
页数:5
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