Proceedings of the 28th International Conference on Micro- and Nano-Engineering - September 16-19, 2002 - Lugano, Switzerland - Preface

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Staufer, U

Vettiger, P

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MICROELECTRONIC ENGINEERING | 2003年 / 67-8卷

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10.1016/S0167-9317(03)00225-9

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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