Contactless surface acoustic wave gas sensor

被引：0
|
作者：
Beck, K [1 ]
Kunzelmann, T [1 ]
von Schickfus, M [1 ]
Hunklinger, S [1 ]
机构：
[1] Univ Heidelberg, Inst Angew Phys, D-69120 Heidelberg, Germany
来源：
EUROSENSORS XII, VOLS 1 AND 2 | 1998年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A contactless surface acoustic wave device and its application as gas sensor is presented. The surface acoustic wave is excited and detected inductively, so that no bonding wires are required. In order to show the, suitablity of this type of device for sensor applications we present two measurements in different temperature regimes. For the detection of organic solvents at room temperature the device was coated with polyepichlorhydrine, and for the detection of methane at 400 degrees C the device was coated with Pd-doped SnO2.
引用
收藏
页码：93 / 96
页数：4
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