Large piezoresponse of lead-free Bi0.5(Na0.85K0.15)0.5TiO3 thin film

被引:29
|
作者
Ahn, Chang Won [1 ,2 ]
Won, Sung Sik [1 ,2 ]
Ullah, Aman
Lee, Sun Young [1 ,2 ]
Lee, Su Dae [3 ]
Lee, Ji Hye [4 ]
Jo, William [4 ]
Kim, Ill Won [1 ,2 ]
机构
[1] Univ Ulsan, Dept Phys, Ulsan 680749, South Korea
[2] Univ Ulsan, Energy Harvest Storage Res Ctr, Ulsan 680749, South Korea
[3] Kyungnam Univ, Dept Phys, Masan 630701, South Korea
[4] Ewha Womans Univ, Dept Phys, Seoul 120750, South Korea
关键词
Lead-free; Ferroelectric; Thin film; Bismuth sodium titanate; Piezoelectric; PIEZOELECTRIC PROPERTIES; ELECTRICAL-PROPERTIES; CERAMICS; BISMUTH; STRESS; SINGLE; TOXICITY; STRAIN;
D O I
10.1016/j.cap.2011.12.005
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
0.85Bi(0.5)Na(0.5)TiO(3)-0.15Bi(0.5)K(0.5)TiO(3) (BNKT15) lead-free thin films were prepared on Pt(111)/TiO2/SiO2/Si(100) substrates by the chemical solution deposition method. BNKT15 are MPB composition in the Bi0.5Na0.5TiO3-Bi0.5K0.5TiO3 (BNT-BKT) system. The maximum piezoelectric coefficient (d(33,f)) value of BNKT15 thin film is approximately 75 pm/V, which is comparable to that of polycrystalline PZT thin films. These results suggest that BNKT15 thin film can be used as an alternative for PZT films in piezoelectric micro-electromechanical systems. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:903 / 907
页数:5
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