The IMGC calibration set-up for microdisplacement actuators

被引：0

作者：

Sacconi, A ^{[1
]}

Picotto, GB ^{[1
]}

Pasin, W ^{[1
]}

机构：

[1] CNR, Ist Metrol G Colonnetti, I-10135 Turin, Italy

来源：

1998 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS DIGEST | 1998年

关键词：

D O I：

10.1109/CPEM.1998.699963

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In the calibration of piezo-capacitive displacement actuators, use is made of an interferometric set-up with sub-nanometric resolution. In order to minimise the periodic non-linearity effect of the interferometer, accurate h-steps are obtained from a computer-based loop control of the out-of-phase between the reference and the measuring signal of the interferometer. Experimental results show a standard uncertainty of about 1 nm + 0.7 . 10(-4) L/mu m.

引用

页码：385 / 386

页数：2

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